Tailored voltage waveforms applied to a capacitively coupled chlorine discharge
نویسندگان
چکیده
منابع مشابه
Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control
A comprehensive hybrid model of a hydrogen capacitively coupled plasma, including a detailed description of the molecular vibrational kinetics, has been applied to the study of the effect of tailored voltage waveforms (TVWs) on the production kinetics and transport of negative ions in these discharges. Two kinds of TVWs are considered, valleys-to-peaks and saw-tooth, with amplitude and slope as...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2020
ISSN: 1361-6595
DOI: 10.1088/1361-6595/aba920