The SnO2/MXene Composite Ethanol Sensor Based on MEMS Platform

In recent years, two-dimensional layered material MXene has attracted extensive attention in the fields of sensors due to its large specific surface area and rich active sites. So, we employed multilayer Ti3C2TX SnO2 microspheres prepare SnO2/MXene composites for enhancing gas-sensing properties pristine SnO2. The composite was brushed on a microelectromechanical system (MEMS) platform make resistance-type gas with low power consumption. results show that sensor best ratio (SnO2: mass is 5:1, named SM-5) greatly improves sensitivity sensor, among which ethanol highest. At same time, also speeds up response recovery speed sensor. When SM-5 worked at optimal temperature 230 °C, value 10 ppm reaches 5.0, twice Its time are only 14 s 26 s, respectively. sensing mechanism discussed according classical space charge or depletion layer model. It concluded Schottky barrier metal Ti3C2Tx responsible improvement composite.