Thickness Measurement of Film having Low Viscoelastic Modulus
نویسندگان
چکیده
منابع مشابه
Equivalent-circuit model for the thickness-shear mode resonator with a viscoelastic film near film resonance.
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1979
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.45.1359