Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation
نویسندگان
چکیده
منابع مشابه
Micro-particle manipulation by single beam acoustic tweezers based on hydrothermal PZT thick film.
Single-beam acoustic tweezers (SBAT), used in laboratory-on-a-chip (LOC) device has promising implications for an individual micro-particle contactless manipulation. In this study, a freestanding hydrothermal PZT thick film with excellent piezoelectric property (d33 = 270pC/N and kt = 0.51) was employed for SBAT applications and a press-focusing technology was introduced. The obtained SBAT, act...
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ژورنال
عنوان ژورنال: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
سال: 2019
ISSN: 0885-3010,1525-8955
DOI: 10.1109/tuffc.2019.2926211