Transmission Target for a MEMS X-Ray Source

This paper describes a major step towards the development of first fully MEMS X-ray source. It focuses mostly on transmission target that is responsible for converting electron beam into radiation. The simulation and experimental results are presented, allowing investigation influence material, thickness, energy obtained radiation intensities spectra. has been proven one can apply silicon membrane as an working with energies below 25 keV. also shown covering metals such nickel or tantalum significantly improve intensity. Moreover, article presents how exactly these contribute to spectrum, i.e. which gives more coherent broadband. 2023-0040