Ultra-High <i>Q</i> of 11000 in Surface Acoustic Wave Resonators by Dispersive Modulation
نویسندگان
چکیده
In this work, a method to reduce the acoustic energy loss has been proposed, and GHz ultra-high ${Q}$ wave resonators based on LiTaO3-on-SiC (LTOSiC) substrate were demonstrated. By modulating ratio of LiTaO3 film thickness interdigital transducer pitch ( notation="LaTeX">${h}_{\textit {LT}}/\lambda {)}$ , adjoined X Z polarization components guided shear horizontal surface (SH-SAW) can be significantly diminished, effectively reduced. The modulated dispersive SH-SAW resonator shows an excellent Bode- 11000 Figure merit (FoM) 620. addition, as predicted by propagation delay lines LTOSiC, high factors achieved when $ is less than 0.14. These results suggest feasibility developing low-loss devices LTOSiC for wireless communications.
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ژورنال
عنوان ژورنال: IEEE Electron Device Letters
سال: 2023
ISSN: ['1558-0563', '0741-3106']
DOI: https://doi.org/10.1109/led.2023.3258459