Uncooled thin film infrared imaging device with aerogel thermal isolation: deposition and planarization techniques
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منابع مشابه
Uncooled Thin Film Infrared Imaging Device with Aerogel Thermal & dGqgD $ J ? - Deposition and Planarization Techniques 0971
:mCl Quum INSrnCrnD3 Abstract We have successfully integrated a thermally insulating silica aerogel thin film into a new uncooled monolithic thin film infrared (E) imaging device. Compared to other technologies (bulk ceramic and microbridge), use of an aerogel layer provides superior thermal isolation of the pyroelectric imaging element from the relatively massive heat sinking integrated circui...
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 1998
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(98)01031-1