Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry

ellipsometry and Mueller matrix polarimetry

We characterized two samples consisting of photoresist layers on silicon with square arrays of square holes by spectroscopic ellipsometry (SE) and Mueller matrix polarimetry (MMP). Hole lateral dimensions and depths were determined by fitting either SE data taken in conventional planar geometry or MMP data in general conical diffraction configurations. A method for objective determination of th...

Mueller matrix ellipsometry studies of nanostructured materials

Materials can be tailored on the nano-scale to show properties that cannot be found in bulk materials. Often these properties reveal themselves when electromagnetic radiation, e.g. light, interacts with the material. Numerous examples of such types of materials are found in nature. There are for example many insects and birds with exoskeletons or feathers that reflect light in special ways. Of ...

Measurement of the Mueller matrix for phytoplankton1

Measurement of the light-scattering Mueller matrix of phytoplankton cultures resulted in a characteristic Mueller matrix much like that of seawater. Voss and Fry (1984) measured the scattering of polarized light by ocean water. We here report measurements of various phytoplankton cultures made to further our understanding of the ocean water measurements. To quantify changes in polarization due ...

Application of spectroscopic ellipsometry and Mueller ellipsometry to optical characterization.

This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced tec...

Wave Equation Resampling of Unevenly Spaced Traces