Using Micro-Raman Spectroscopy to Assess MEMS Si/SiO2 Membranes Exhibiting Negative Spring Constant Behavior
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چکیده
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ژورنال
عنوان ژورنال: Experimental Mechanics
سال: 2012
ISSN: 0014-4851,1741-2765
DOI: 10.1007/s11340-012-9656-7