VARIABLE FREQUENCY CONTROL FOR SPIDER-DRIVEN ULTRA-PRECISION STAGES
نویسندگان
چکیده
منابع مشابه
Variable Frequency Control for Spider-driven Ultra-precision Stages
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ژورنال
عنوان ژورنال: IFAC Proceedings Volumes
سال: 2005
ISSN: 1474-6670
DOI: 10.3182/20050703-6-cz-1902.01227