Young’s Modulus Measurement for Polysilicon Thin Film by Tensile Testing

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...................................................................................................................ii Declaration .............................................................................................................iii Acknowledgments ................................................................................................... iv List of publications .................

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ژورنال

عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines

سال: 2003

ISSN: 1341-8939,1347-5525

DOI: 10.1541/ieejsmas.123.577