Controllability and Performance of Feedback Control System for Overlay
نویسنده
چکیده
Cypress Semiconductor has implemented an automated Advanced Process Control (APC) system for feedback control of overlay. During the APC implementation, a number of factors affecting the controllability and performance of the APC system were addressed. This paper describes the factors that can impact APC system performance and discusses approaches taken to mitigate these impacts on the controllability and performance of overlay.
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تاریخ انتشار 2003