Viscosity response of shear horizontal surface acoustic wave on AlN=sapphire structure
نویسندگان
چکیده
The effect of viscous liquid loading on SH-SAW devices on AlN=sapphire structure has been experimentally investigated. The sensitivity of the devices to liquid (glycerol=water mixtures) viscosity changes is measured to be approximate 8.2 10 9 m s=kg, which is only about 30% of that of commonly used quartz Love wave devices. This indicates that, when used for mass sensing in liquid, the AlN SHSAW devices have better tolerance to viscous perturbation.
منابع مشابه
Angular dependence of surface acoustic wave characteristics in AlN thin films on a-plane sapphire substrates
AlN thin films have been grown on a-plane sapphire (Al2O3(112̄0)) substrates. X-ray diffraction measurements indicate the films are fully c-plane (0001) oriented with a full width at half maximum of the AlN(0002) rocking curves of 0.76–0.92◦. The epitaxial growth relationships have been determined by the reflection high energy electron diffraction analysis as AlN[11̄00]//Al2O3[0001] and AlN[112̄0]...
متن کاملAcoustic physics of surface-attached biochemical species.
In this Commentary, we discuss the paper Quantitative Determination of Size and Shape of Surface-Bound DNA Using an Acoustic Wave Sensor [Tsortos et al., Biophys. J. 94(7), 2706-2715 (2008)]. The paper under discussion presents a novel theory that uses the response of a Shear-Horizontal Surface Acoustic Wave device to characterize surface-attached double- and triple-strand DNA. The authors rela...
متن کاملPropagation of a shear-horizontal surface acoustic mode in a periodically grooved AlNÕAl2O3 microstructure
We investigate the shear-horizontal surface acoustic waves ~SH-SAWs! generated on an AlN/Al2O3 microstructure by laser-micromachined grooves on the AlN film. In the absence of grooves, the AlN/Al2O3 device shows resonance for only a lower velocity SAW mode. However, when grooves of periodicity smaller than half the wavelength of the surface acoustic wave are micromachined, a higher velocity res...
متن کاملMass sensitivity of dual mode SAW delay lines on AlN=sapphire structure
Introduction: There have been growing demands in recent years for highly sensitive surface acoustic wave (SAW) sensors that are able to detect minute quantities, especially in the chemical and biological fields. AlN is a promising material to fulfil such a task because of its high SAW velocity and good piezoelectricity [1]. Compared to conventional bulk piezoelectric materials such as quartz an...
متن کاملPreparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices
In this work, aluminum nitride (AlN) thin films with different thicknesses were deposited on quartz and silicon substrates using single ion beam sputtering technique. The physical and chemical properties of prepared films were investigated by different characterization technique. X-ray diffraction (XRD) spectra revealed that all of the deposited films have an amorphous str...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2007