MST MEMS compact modeling meets model order reduction: Requirements and Benchmarks
نویسندگان
چکیده
Needs for model reduction in microsystem technology (MST) are described from an engineering perspective. The MST model reduction benchmarks are presented in order to facilitate further development in this area. The first benchmark application is electro-thermal simulation and the second one is an electrostatically actuated beam. Model reduction is contrasted with compact modeling, which currently enjoys widespread use among engineers, and important problems to be solved are listed.
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تاریخ انتشار 2004