Maximally Confined Silicon Microring and Microdisk Modulators and Switches

Silicon resonant microdisk and microring modulators and switches based on free-carrier depletion and injection were designed and fabricated with the aim of minimizing device radius to theoretical bend-radiation imposed limits. Minimizing device area serves to simultaneously maximize resonator free-spectral-range, minimize switching energy, and maximize component density, all critical parameters for wideband chip-to-chip and intrachip communication applications. Confinement of the bend-mode in the modulators is minimized by contacting the modulator from within the interior of the resonator to ensure a hard outer wall of the cavity. Both numerical and experimental results will be presented.