Solid-phase crystallization of ultra high growth rate amorphous silicon films
نویسندگان
چکیده
K. Sharma, M. V. Ponomarev, M. A. Verheijen, O. Kunz, F. D. Tichelaar, M. C. M. van de Sanden, and M. Creatore Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands CSG Solar Pty Ltd, 82 Bay St, Botany, New South Wales 2019, Sydney, Australia Kavli Institute of Nanoscience, Delft University of Technology, P. O. Box 5046, 2600 GA Delft, The Netherlands FOM Institute for Plasma Physics Rijnhuizen, P. O. Box 1207, 3430 BE Nieuwegein, The Netherlands
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تاریخ انتشار 2012