Mechatronic Vibration Isolator for the Microtechnics with Real-time Interaction

A mechatronic vibration isolation system has been developed on the basis of system theory. This equipment integrates mechanics, pneumatics and electronics in synergistic co-operation. The electronic control is responsible for the dynamic behaviour and the special computing transfer block for the real time interaction and compensation of floor vibration disturbances. INTRODUCTION The method for active compensation of the influences of disturbances is not new in the control science and in the mechatronics. There may be however several new fields and examples in the application of this method and the paper tries to give a contribution especially for the finding of optimal transfer functions for the blocks of real-time interaction on the basis of the system science. The problem is even more complicated if it is a mixed technical system to control like it is often the task in the mechatronics. THE DEMONSTRATION EXAMPLE This presented system has been developed by a joint research team of the TU Budapest and the TU Ilmenau in Germany for tasks of the microtechnics. The correct operation of precision instruments and measuring equipment and the processes of technology in the microtechnics and microsystemtechnics can be disadvantageous influenced by environment vibrations. The Fig. 1-a. illustrates that the different types of environmental disturbances and sources of vibration can not be described and eliminated with simple spring-mass systems and models. One of the main problems is the insufficiency of the attainable damping in the critical frequency range of the building vibrations (0.1 10 Hz) since the well-known commercial equipment can not reach the desired vibration levels on the protected instruments, for example see in Fig. 1-b. CLASSIFICATION OF ISOLATION METHODS First of all some expressions are to be explained on the basis of the system science. The equipment for vibration isolation work passive like damped spring-mass systems if there is only a flow of material and/or energy in them. Systems are active, if they are controlled and there is also a direct compensation of disturbances of the environment and there is a flow of information beside of the flow of material and/or energy. According this classification the conventional vibration isolators with pneumatic control for the position of the table are semiactive systems.