A SERCOS NETWORK BASED MODULAR MOTION SOLUTION for SEMICONDUCTOR & FPD EQUIPMENTS
نویسندگان
چکیده
Recently, the field of semiconductor and FPD (Flat Panel Display) equipments has been the major application area of high precision servo systems. The requirements of this market are the PC-based motion control, multi-axis control, and the network based solution to reduce the installation, set-up and maintenance cost. In this paper, we presents a SERCOS network based modular motion solution (MMC-II and CSDM) which is recently adopted in OLB (Outer Lead Bonding) machine for FPD manufacturing equipments. This motion solution offers outstanding scalability and cost advantages through SERCOS network capability and modular servo drives with common DC bus configuration. Copyright © 2008 IFAC
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تاریخ انتشار 2008