Theoretical and experimental study of a 30 nm metallic slot array
نویسندگان
چکیده
We present the simulation, fabrication, and characterization of ametallic slot grating on a siliconwaveguide (30nm slot width for a period of 500nm). According to the simulation, the experimental measured spectrum of the structure exhibits a dip in the near-infrared region. Moreover, the finite-difference time-domain simulation shows that this device can be used as a sensor, due to its high sensitivity to the refractive index variation of the medium above and inside the cavity (η 1⁄4 Δλ=Δn 1⁄4 750nm=refractive index unit). © 2011 Optical Society of America OCIS codes: 310.6628, 310.6805, 220.4241, 130.6010.
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تاریخ انتشار 2011