Nanodevices for correlated electrical transport and structural investigation of individual carbon nanotubes

We report a new approach to the correlation of the structural properties and the transport properties of carbon nanotubes. Through an original combination of UV lithography, custom-made photosensitive sol–gel resist and deep reactive ion etching (RIE), we have successfully integrated membrane technology and nanodevice fabrication for the electrical connection of individual carbon nanotubes. After single wall nanotube (SWNT) deposition by molecular combing and contacting using high resolution electron beam lithography, we obtain a device that allows both the investigation of the nanotubes and the contact regions by transmission electron microscopy (TEM) and the measurement of the electronic transport properties of the same individual nano-object. The whole fabrication process is detailed and the demonstration that the micro membranes are suitable for both TEM inspection and nanoelectrode fabrication is given.