Phosphine dissociation on the Si(001) surface.
نویسندگان
چکیده
Density functional calculations are performed to identify features observed in STM experiments after phosphine (PH3) dosing of the Si(001) surface. On the basis of a comprehensive survey of possible structures, energetics, and simulated STM images, three prominent STM features are assigned to structures containing surface bound PH2, PH, and P, respectively. Collectively, the assigned features outline for the first time a detailed mechanism of PH3 dissociation and P incorporation on Si(001).
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عنوان ژورنال:
- Physical review letters
دوره 93 22 شماره
صفحات -
تاریخ انتشار 2004