Very high growth rate chemical vapor deposition of single-crystal diamond.

نویسندگان

  • Chih-Shiue Yan
  • Yogesh K Vohra
  • Ho-Kwang Mao
  • Russell J Hemley
چکیده

Diamond possesses extraordinary material properties, a result that has given rise to a broad range of scientific and technological applications. This study reports the successful production of high-quality single-crystal diamond with microwave plasma chemical vapor deposition (MPCVD) techniques. The diamond single crystals have smooth, transparent surfaces and other characteristics identical to that of high-pressure, high-temperature synthetic diamond. In addition, the crystals can be produced at growth rates from 50 to 150 mum/h, which is up to 2 orders of magnitude higher than standard processes for making polycrystalline MPCVD diamond. This high-quality single-crystal MPCVD diamond may find numerous applications in electronic devices as high-strength windows and in a new generation of high-pressure instruments requiring large single-crystal anvils.

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عنوان ژورنال:
  • Proceedings of the National Academy of Sciences of the United States of America

دوره 99 20  شماره 

صفحات  -

تاریخ انتشار 2002