Decoupling Optimization of Flexure Hinge and Lever Magnifying Mechanism for an Xy Compliant Micromanipulator

The micro/nano motion stage with ultra-high precision are urgently required to perform such tasks as operation under scanning probe, bio-cell manipulation, optical fibers alighment, etc. The compliant XY micro manipulator employing flexure hinges is widely applying due to their excellent characteristics of simple structure, no backlash, no nonlinear friction, and so on [1]. Some novel compliant parallel manipulators are designed to suppress the coupling of motion of multi manipulation DOP [2, 3]. However, balance of decoupling and magnifying ratio of lever mechanisms is still one of the critical points for designing. Concerning the compliant XY micro manipulator having flexure hinges and lever mechanisms with piezo-driven actuators, aiming at optimal performance of as large magnification ratio and little coupling, the paper applied measures to the original stage. FEM analyses in ANSYS were performed to verify the minimum parasitic motion effects and guarantee the workspace, which just validated the assumptions.