High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications
نویسندگان
چکیده
منابع مشابه
Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique
This paper presents a chip-level integration of radio-frequency (RF) microelectromechanical systems (MEMS) air-suspended circular spiral on-chip inductors onto MOSIS RF circuit chips of LNA and VCO using a multi-layer UV-LIGA technique including SU-8 UV lithography and copper electroplating. A high frequency simulation package, HFSS, was used to determine the layout of MEMS on-chip inductors wi...
متن کاملThe effects of etching and deposition on the performance and stress evolution of open through silicon vias
In order to embed more functionality and performance into the same design space, 3D IC integration technology is one of the routes towards further miniaturization of ICs and consequently, printed circuit boards. 3D TSV (through silicon via) stacking of wafers or dies requires die-to-die interconnections to conduct electricity and heat. Typically micro bump contacts with solder (e.g. AgSn) and C...
متن کاملPhotonic integrated Mach-Zehnder interferometer with an on-chip reference arm for optical coherence tomography.
Optical coherence tomography (OCT) is a noninvasive, three-dimensional imaging modality with several medical and industrial applications. Integrated photonics has the potential to enable mass production of OCT devices to significantly reduce size and cost, which can increase its use in established fields as well as enable new applications. Using silicon nitride (Si3N4) and silicon dioxide (SiO2...
متن کاملAssessment of X-Ray Crosstalk in a Computed Tomography Scanner with Small Detector Elements Using Monte Carlo Method
Introduction: Crosstalk is a leakage of X-ray or light produced in a matrix of X-ray detectors or array of photodiodes in one element to other elements affecting on image contrast and spatial resolution. In this study, we assessed X-ray crosstalk in a computed tomography (CT) scanner with small detector elements to estimate the effect of various parameters such as X-ray tube voltage, detector e...
متن کاملDesign of Small Animal Computed Tomography Imaging for in vitro and in vivo Studies
Introduction: Mini Computed Tomography (mini-CT) was suggested in biomedical research to investigate tissues and small animals. We present designed and built a mini x-ray computed tomography (mini-CT) for small animals as well as industrial component imaging. Materials and Methods: The system used in this study includes a X-ray tube 20kV to 160kV and a flat pa...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
- Microelectronics Reliability
دوره 55 شماره
صفحات -
تاریخ انتشار 2015