Towards Inertial Grade Vibratory Microgyros: a High-q In-plane Silicon-on-insulator Tuning Fork Device
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چکیده
This paper reports on the design and implementation of an in-plane solid-mass single-crystal silicon tuning fork gyro that has potential to achieve inertial-grade performance. A novel design is devised to achieve high Q in the drive and sense resonant modes (Qdrive=84,000 and Qsense=64,000) with effective decoupling. The gyroscope was fabricated on 40μm SOI using a two-mask process. The drive and sense resonant modes were matched electronically to within 0.07% of each other and the measured rate results show a sensitivity of 1.25mV/o/s in a bandwidth of 12Hz.
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تاریخ انتشار 2004