Performance enhancement of an out-of-plane electret-based vibrational energy harvester with dual charged plates

Electret Length Optimization of Output Power for Double-End Fixed Beam Out-of-Plane Electret-Based Vibration Energy Harvesters

Thanks to miniaturization, it is now possible to imagine self-powered systems that can harvest energy from the environment to produce electrical energy. Out-of-plane electret-based vibration energy harvesters (E-EVHs) are an effective and inexpensive energy harvester type that has attracted much attention. Increasing the capacitance of variable capacitors is an effective way to improve the outp...

Photoelectric-Charging-Enhanced MEMS Electret Energy Harvester with Vacuum Packaging

A novel MEMS electret energy harvester charged with UV light after sealed in a vacuum package is proposed. By 265 nm UV irradiation, electrons are generated inside the package through the photoelectric effect. Uniform surface potential on sidewalls of the comb drives has been obtained. With a MEMS electret generator in a 60 Pa package, 2.28 μW has been obtained at 1 g and 740 Hz, which is 10 ti...

Development of a Mems Energy Harvester with High-perfomance Polymer Electrets

Recent progress on high-performance polymer electrets based on CYTOP, novel charging methods using soft X-ray and vacuum UV, and development of MEMS energy harvesters are discussed. With the parylene high-aspect-ratio nonlinear springs and high-performance polymer electrets, we have successfully developed a MEMS electret generator for energy harvesting applications. With an acceleration of 1 G,...

Electret-based Unsteady Thermal Energy Harvester using Potassium Tantalate Niobate Crystal

Characterisation of an Electrostatic Vibration Harvester

Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable capacitor, which is polarized by an electret. A lumped element model is used to study the generator and design a prototype. The device has been micromachined...