Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

نویسندگان

  • H. D. Tong
  • F. C. Gielens
  • H. T. Hoang
  • J. W. Berenschot
  • M. J. De Boer
  • J. G. E. Gardeniers
  • H. V. Jansen
  • W. Nijdam
  • C. J. M. van Rijn
  • M. C. Elwenspoek
چکیده

This paper presents wafer-scale palladium silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates

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تاریخ انتشار 2000