Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm

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Abstract:

external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is 45 mV, and the maximum output of MEMS microphone is 1.125 µV.

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Journal title

volume 23  issue 3

pages  191- 200

publication date 2010-12-01

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