P. Heydari
Faculty of Engineering, Islamic Azad university, Roudehen Branch.
[ 1 ] - Fabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, Metal-assisted chemical etching (MaCE) was carried out with silver catalyst. Provided solution (or materiel) in combination with laser interference lithogr...
[ 2 ] - طراحی و ساخت میکروآیینه شکلپذیر پلیمری جهت استفاده در سیستمهای اپتیک تطبیقی
This paper presents a novel method for the fabrication of polymeric deformable micromirror based on electrostatic actuator. Deformable micromirros are commonly used to correct optical wavefront aberrations in the adaptive optic systems, and thus, they need a deformable diaphragm. In this study, the diaphragm of micromirror is made from SU-8 polymer which is mounted on the fixed electrode arrays...
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