اسفندیاری, مهرناز

[ 1 ] - طراحی و ساخت میکروآیینه شکل‌پذیر پلیمری جهت استفاده در سیستم‌های اپتیک تطبیقی

This paper presents a novel method for the fabrication of polymeric deformable micromirror based on electrostatic actuator. Deformable micromirros are commonly used to correct optical wavefront aberrations in the adaptive optic systems, and thus, they need a deformable diaphragm. In this study, the diaphragm of micromirror is made from SU-8 polymer which is mounted on the fixed electrode arrays...