Mojtaba Shams Nateri
Electrical Engineering, Babol University of Technology
[ 1 ] - The Effect of Material Properties on Sensitivity of the Microelectromechanical Systems Piezoelectric Hydrophone
In this paper, we present mathematical analyses to consider the effect of material properties on the sensitivity of the Microelectromechanical systems (MEMS) piezoelectric hydrophone and improve the sensitivity by choosing the proper material. The selected structure in the present paper is a piezoelectric hydrophone able to work at low frequencies. The piezoelectric hydrophones are widely used ...
[ 2 ] - Modeling of capacitance and sensitivity of a MEMS pressure sensor
In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can b...
[ 3 ] - Design of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
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