This paper introduces machining of optics, presenting some of the history of machining progress, critical machining variables, material and geometrical capabilities, and some new results on optical evaluation of machined surfaces. A most significant development is electroplating of materials that are otherwise not presently machinable. For example, molybdenum has been electroplated with silver ...

The microstructure evolution of electroplated copper films was characterized by electron backscatter diffraction (EBSD). Special care was taken during the preparation of the cross-sectional specimens and microstructure analysis to obtain reliable results. The film exhibited a columnar grain structure with a large fraction of twin boundaries. Annealing induced normal grain growth and caused many...

Electroplated magnetic films have been integrated with silicon-based surface micromachining to fabricate magnetically actuated microflexure structures. Both the “frame-plating” technique and also a less complex onemask plating process have been used to electrodeposit NiFe onto polysilicon flexures coated with Cr-Cu seed layers. The microactuators are released by removing the underlying sacrific...

Results on design, fabrication, and testing of silicon micromachined magnetic actuators are presented. Electroplated, low-stress permalloy (Ni80Fe20) material is the medium for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic ...