In this paper, the design of silicon based cantilevers for scanning probe microscopy has been described in detail. ANSYS software has been used as a tool to design and model the mechanical properties of the silicon based cantilevers. The incorporation of stress concentration regions (SCRs) with a thickness smaller than the cantilever thickness, to localize stresses, has been explored in detail ...

Atomic force microscopy (AFM) is a technique to image surfaces with unprecedented vertical and lateral resolution. Many related techniques have been derived from AFM, taking advantage of local interactions between a tip on a cantilever and a surface. However, cantilevers can also be used for sensing applications. These so-called nanosensors feature extreme sensitivity for the detection of chemi...

We critically discuss the extraction of intrinsic cantilever properties, namely eigenfrequency f n , quality factor Q n and specifically the stiffness k n of the nth cantilever oscillation mode from thermal noise by an analysis of the power spectral density of displacement fluctuations of the cantilever in contact with a thermal bath. The practical applicability of this approach is demonstrated...

In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam dampin...

In this paper, the Ritz method has been employed to analyze the free in-plane vibration of heterogeneous (non-uniform) rectangular nanoplates corresponding to Eringen’s nonlocal elasticity theory. The non-uniformity is taken into account using combinations of linear and quadratic forms in the thickness, material density and Young’s modulus. Two-dimensional boundary characteristic orthogonal pol...

Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. The MIT Faculty has made this article openly available. Please share how this access benefits you. Your story matters. Abstract Cantilever sensors have attracted considerable attention over the last decade because of their potential a...

2D metal–organic frameworks are attractive filler in mixed matrix membranes (MMMs) due to the high aspect ratio and contact opportunity at filler–polymer interface. However, their alignment polymer remains a challenge fully play functions. Herein, our best knowledge, for first time, facile synthesis of KAUST-7-NH2 (KAUST, King University Science Technology) nanoplate is reported with 1D channel...

In this paper, buckling and free vibration analysis of a circular tapered nanoplate subjected to in-plane forces were studied. The linear variation of the plate thickness was considered in radial direction. Nonlocal elasticity theory was employed to capture size-dependent effects. The Raleigh-Ritz method and differential transform method were utilized to obtain the frequency equations for simpl...

the static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. two engineering cases including cantilever and double cantilever micro-beam are considered. considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent euler-bernoulli beam model is used based on a modified couple stress theory, c...

In this paper, a plane quadrilateral element with rotational degrees of freedom is developed. Present formulation is based on a hybrid functional with independent boundary displacement and internal optimum strain field. All the optimality constraints, including being rotational invariant, omitting the parasitic shear error and satisfying Fliepa’s pure bending test, are considered. Moreover, the...