This paper is concerned with the development of a piezoelectric d15 shear-induced torsion actuator made of a lead-free piezoceramic material exhibiting giant piezoelectric shear stress coefficient (e15) and piezoelectric transverse shear actuation force comparable to that of lead-based shear-mode piezoceramics. The Mn-modified 0.93(Na0.5Bi0.5TiO3)-0.07BaTiO3 (NBT-BT-Mn) composition exhibited ex...

In this paper, an operator-based nonlinear vibration control of a flexible arm experimental system using piezoelectric actuator with hysteresis is discussed. The piezoelectric actuator exhibits hysteretic effects in the output displacement responses, which can cause inaccuracy and undesirable oscillations, where Prandtl-Ishlinskii(PI) model is used to describe the hysteresis. In order to compen...

Recent development in high-speed nanotechnology applications, such as scanning probe microscopy and nanofabrication, has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems. These systems are capable of providing motions with sub-nanometer resolution over a positioning bandwidth of a few kilohertz or more. High-speed nanopositioning devices are commonl...

Piezoelectric actuators are widely used in applications of micropositioning. In the most situations, there is a contact with an environment. Existence of external forces is a challenging problem in controlling mechanical system, especially in micro scales such as piezoelectric actuators. In such a situation, dual hysteresis nonlinearity effects could disrupt the actuator micropositioning accura...

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed...

The purpose of this work is to control the vibration of the plate with the help of neural network controller. Using augmented equations, a finite element model of a two-dimensional cantilever plate instrumented with a piezoelectric patch sensor-actuator pair is derived. The contribution of piezoelectric sensor and actuator layers on the mass and stiffness of the plate is considered. As mesh siz...

Micromanipulation is a key task to perform serial assembly of MEMS. The two-fingered microgrippers are usable but require specific studies to be able to work in the microworld. In this paper, we propose a new microgripping system where actuators and the end-effectors of the gripper are fabricated separately. End-effectors can thus be adapted to the manipulated micro-objects without new design a...

For Common R or R-L load to apply arbitrary voltage, the bridge traditional inverters don’t have any difficulties by PWM method. However for driving some piezoelectric actuator, arbitrary voltage not a pulse but a steady voltage should be applied. Piezoelectric load is considered as R-C load and its voltage does not decrease even though the applied voltage decreases. Therefore it needs some spe...

We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-s...