NATURE | VOL 400 | 5 AUGUST 1999 | www.nature.com 547 J. Chem. Phys. 108, 5888±5897 (1998). 26. MacGorman, D. R. & Rust, W. D. The Electrical Nature of Storms 32 (Oxford Univ. Press, New York, 1998). 27. Pruppacher, H. R. & Klett, J. D. Microphysics of Clouds and Precipitation 813±814 (Kluwer Academic, Dordrecht, 1996). 28. Di Palma, T. M., Latini, A., Satta, M. & Giardini Guidoni, A. Molecular...

The rotary electrostatic microactuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. In most of conventional type of electrostatic microactiators using rotary mode, the electrodes have not been rigorously evaluated in terms of optimality for the shape and simply have been adopted in a straight shape. As a result, two neighboring elec...

The resource-infrastructure-environment (RIE) index was proposed as an alternative measure of progress which was then employed to: (a) compare the aggregate (single summary) index findings between Australia (mid-industrialised nation), Mexico (emerging economy), and the US (highly industrialised nation); and (b) compare the RIE index against the gross domestic product (GDP), human development i...

Etching high aspect ratio trenches (HART’s) in silicon is becoming increasingly important for MEMS applications. Currently, the most important technique is dry reactive ion etching (ME). This paper presents solutions for the most notorious problems during etching HART’s: tilting and the aspect ratio dependent etching effects such as bowing, RIE lag, bottling, and micrograss or black silicon. To...

A process methodology enabling the fabrication of various nanodevices is demonstrated that is compatible with standard integrated circuit processes and recently developed MEMS technologies. The basic devices are laterally suspended single-crystal silicon nanowires with diameters from ~20 nm formed by a single DRIE etch step and oxidation thinning cycles. These nanowires can further serve as mol...

A novel fabrication process is proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications. This process combines diamond turning technology and photolithographic processes. To prevent thin-film lens substrates from deflection during diamond turning, films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure is generat...

Fatty acid esterification is increasingly realized as a reactive distillation (RD) process because of its formation being affected by the chemical equilibrium. The reactive distillation column performance for the production of isopropyl palmitate by esterification of the palmitic acid with isopropanol has been studied in the present research. The reaction was catalyzed in the presence of zinc a...

Uniform arrays of nano-sized pore produced in porous alumina were transferred into InP substrates by inductively coupled plasma reactive ion etching (ICP-RIE). We observed a significant enhancement in the light output from InP substrate with nanohole arrays on the surface. Photoluminescence intensity of triangular arrays of air cylinders on InP substrate showed an enhancement up to 3 times comp...

We have investigated laser ablation as a microfabrication approach to produce micro fuel cells (MFCs) in silicon. Picosecond pulses (15 ps) at a wavelength of 355 nm are used to make all of the MFC structures. To assess the benefits and drawbacks of laser ablation, reference cells have been produced by deep reactive ion etching (DRIE) using matching geometries. Ablated and etched cells have bee...

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