We present a theoretical investigation of stiction in nanoscale electromechanical contact switches. We develop a mathematical model to describe the deflection of a cantilever beam in response to both electrostatic and van der Waals forces. Particular focus is given to the question of whether adhesive van der Waals forces cause the cantilever to remain in the 'ON' state even when the electrostat...

Due to advantages such as light weight, flexibility, and low cost, polyvinylidene fluoride (PVDF) films have been widely used in engineering applications as sensors for detecting strain, pressure, or micro-force. However, it is known that PVDF strain sensors have strain cross-sensitivity in mutually orthogonal directions. Furthermore, the size of the PVDF film sensor would also affect the dynam...

We show here that dynamic-mode cantilever sensors enable acoustofluidic fluid mixing and trapping of suspended particles as well as the rapid manipulation and release of trapped micro-particles via mode switching in liquid. Resonant modes of piezoelectric cantilever sensors over the 0 to 8 MHz frequency range are investigated. Sensor impedance response, flow visualization studies using dye and ...

With direct laser writing micro structures can be manufactured by solidifying a photo resist when the beam triggers photochemical reaction in focal voxel. We have used to fabricate thermally actuated microgripper, which move its two cantilever like arms grip micro-objects. One consists thereby of strips with different coefficients thermal expansion such that both cantilevers bends towards each ...

For more than two decades, the Atomic Force Microscope (AFM) has provided valuable insights in nanoscale phenomena, and it is now widely employed by scientists from various disciplines. AFMs use a cantilever beam with a sharp tip to scan the surface of a sample both to image it and to perform mechanical testing. Since the AFM measures the de ection of the probe beam, one must rst nd the spring ...

Nonlinear behavior of a functionally graded cantilever beam is analyzed under non-uniform hygro-thermal effect. To solve this problem, finite element method is applied within plane solid continua. Total Lagrangian approach is utilized in the nonlinear kinematic relations. Newton-Raphson method with incremental displacement is used in nonlinear solution. Comparison study is performed. Effects of...

Design, fabrication, and testing of a micromachined cantilever beam that is optically transmissive and operates in the resonant mode is presented with application as a micro-optical scanner. An optical waveguide is formed from a 2.2 mm thick SiO2 layer deposited on a single crystal silicon wafer and etched to yield a SiO2/Si composite slab cantilever. Using a novel capacitively coupled reactive...

Atomic Force Microscopy (AFM) is a near-field technique to generate high-resolution images of surfaces. A micro-fabricated elastic beam with an integrated sharp sensor tip at its end is scanned over the sample surface. With various dynamic modes, leading to Force Modulation Microscopy [1], Ultrasonic Force Microscopy [2], Atomic Force Acoustic Microscopy (AFAM) [3–5], Microdeformation Microscop...

Abbreviations a 1 , a 2 , a 3 , a 4 and A 1 , A 2 , A 3 , A 4 Constants in the shape function y(x) a C Contact radius α Wave number of the flexural waves A Cross-section area of the cantilever b Thickness of the cantilever c P Ratio φ Lat /φ d Y 0 , d X0 Normalized amplitude of the sensor tip in y-and x-direction, respectively δ n , δ L Normal, lateral contact deflection (in the coordinate syst...

In this study, the free vibration analysis of smart vibration control (SVC) systems based on Reddy – Levinson model and modified strain gradient theory is developed. This system consist of a micro beam at middle and two magneto-electro-elastic (MEE) composite micro beams at top and bottom which connected by enclosing elastic medium and simulated by Winkler and Pasternak foundation. The effects ...