TEM Cantilever Chips In article number 2301439, Chaojian Hou, Jing Zhao, Lixin Dong, and co-workers report a cantilever chip for in situ transmission electron microscopy (TEM). The consists of MoS2 opto-electromechanical sensor plasmonic antenna array built on the top Si3N4 cantilever, forming an electron-beam-transparent (thickness ≈100 nm) nano-opto-electromechanical system (NOEMS), enabling ...

In this paper we develop a numerical procedure using finite element and augmented Lagrangian meth-ods that simulates electro-mechanical pull-in states of both cantilever and fixed beams in microelectromechanical systems (MEMS) switches. We devise the augmented Lagrangian methods for the well-known Euler-Bernoulli beam equation which also takes into consideration of the fringing effect of electr...

When assembling MEMS devices or manipulating biological cells it is often beneficial to have information about the force that is being applied to these objects. This force information is difficult to measure at these scales and up to now has been implemented using laser-based optical force measurement techniques or piezoresistive devices. In this paper we demonstrate a method to reliably measur...

When assembling MEMS devices or manipulating biological cells it is often beneficial to have information about the force that is being applied to these objects. This force information is difficult to measure at these scales and up to now has been implemented using laser-based optical force measurement techniques or piezoresistive devices. In this paper we demonstrate a method to reliably measur...

Power supply is a bottle-neck problem of wireless micro-sensors, especially where the replacement of batteries is impossible or inconvenient. Now piezoelectric material is being used to harvest vibration energy for self-powered sensors. However, the geometry of a piezoelectric cantilever beam will greatly affect its vibration energy harvesting ability. This paper deduces a remarkably precise an...

Intrinsic localized modes (ILMs) have been observed in micromechanical cantilever arrays, and their creation, locking, interaction, and relaxation dynamics in the presence of a driver have been studied. The micromechanical array is fabricated in a 300 nm thick silicon-nitride film on a silicon substrate, and consists of up to 248 cantilevers of two alternating lengths. To observe the ILMs in th...

Commercial atomic force microscopes usually use a position-sensitive photodiode to detect the motion of the cantilever via laser beam deflection. This readout technique makes it possible to measure bending and torsion of the cantilever separately. A slight angle between the orientation of the photodiode and the plane of the readout laser beam, however, causes false signals in both readout chann...