In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended ...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

in this study, an electrostatic sprayer which had been previously designed and constructed was evaluated in order to quantify the charging of droplets. liquid atomization was achieved by using an ultrasonic nozzle. the nozzle maximum flow rate was 25 milliliters per minute and vibration frequency was about 30 khz. the induction method was used for charging the output droplets. all experiments w...

This paper investigates the parametric excitation of a micro-pipe conveying fluid suspended between two symmetric electrodes. Electrostatically actuated micro-pipes may become unstable when the exciting voltage is greater than the pull-in value. It is demonstrated that the parametric excitation of a micro-pipe by periodic (ac) voltages may have a stabilizing effect and permit an increase of the...

A dielectric elastomer transducer is a deformable capacitor, and is under development as a sensor, actuator, or generator. Among various geometric configurations, laterallyconstrained transducer, also known as pure-shear transducer, is easy to implement and effective to couple mechanical force and electrical voltage. This analytical study reveals that lateral pre-stretch enhances actuation, far...

Abstract—A novel dual-pulse actuation voltage has been proposed to reduce dielectric charging in micro-electromechanical system (MEMS) switch, leading to a longer switch lifetime. Mathematical and transient circuit models have been utilized to simulate dielectric charging in the RF MEMS switch, enabling the analysis of charge built-up at the switch dielectric and substrate brought about by the ...

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fi...

The Radiological Research Accelerator Facility at Columbia University has recently added a UV microspot irradiator to a microbeam irradiation platform. This UV microspot irradiator applies multiphoton excitation at the focal point of an incident laser as the source for cell damage, and with this approach, a single cell within a 3D sample can be targeted and exposed to damaging UV. The UV micros...

Electrical actuation of liquid droplets at the microscale offers promising applications in the fields of microfluidics and lab-on-a-chip devices. Much prior research has targeted the electrical actuation of electrically conducting liquid droplets; however, the actuation of dielectric droplets has remained relatively unexplored, despite the advantages associated with the use of a dielectric drop...