The fabrication of integrated circuits relies on a process known as photolithography, in which a photoreactive polymer, or pho-toresist, is applied to the surface of a silicon wafer. Integrated circuit manufacturers rely on photolithography to create the desired features in each layer of chip circuitry. The process requires the selective removal of hardened coatings (resists) from a wafer, leav...

A limited initial study was made to evaluate liquefaction of creosote-treated southern pine wood sawdust with liquefaction of birch wood powder as a control. The objective was to assess the feasibility of using creo_.._. sot&treated southern pine wood as a raw material for the-formulation-of-phenol-basedresmadhesives-Them liquefaction was conducted in the presence of phenol with sulfuric acid a...

Photostabilization is a widely used post lithographic resist treatment process, which allows hardening the resist profile in order to maintain critical dimensions and to increase selectivity in subsequent process steps such as reactive ion etching. In this paper we present the optimization of Deep UV-curing of 0,3-3.5 μm thick positive resist profiles followed by heat treatment up to 280 C. The...