The aim of this study was to deyelop a noyel hydroxyapatite (HA) coating method on zirconia using glass coating technique. A borosi)icate glass, the mixture of the glass ttnd HA (3e, 50, 70, and 90 mass%), and the 100% HA were coated on two kinds of zirconia discs and fired at 900-950'C. After the final coating, the surface of the sample was etched for 3 min in an acid-mixture of 3% HF and 5%HN...

We have developed a new magnetic actuation process for assembling three-dimensional MEMS devices using hinged, surface micromachined structures. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged str...

We demonstrated a practical process of fabricating nickel molds for nanoimprinting. Dual-side polished glass is chosen as the substrate on which nickel nanostructures are successfully electroplated. Photonic crystal structures with 242 nm diameters and other nanoscale pillars down to 9 nm diameters are achieved over a large area. The electroplating parameters are investigated and optimized. Thi...

We have developed a novel high-aspect ratio substratevia technology in silicon that features a SiN insulator liner. In this technology, the via is completely filled with electroplated Cu. We have demonstrated vias with an aspect ratio of 30 and we have verified the integrity of the liner in vias with an aspect ratio of 8. The impedance of individual vias was measured in the microwave regime usi...

The plane-strain bulge test is used to investigate the mechanical behavior of freestanding electroplated Cu thin films as a function of film thickness and microstructure. The stiffness of the films increases slightly with decreasing film thickness because of changes in the crystallographic texture and the elastic anisotropy of Cu. Experimental stiffness values agree well with values derived fro...

* Electrochemical Society Active Member./-

The continuous and rapid increase of areal density in magnetic data storage systems required a continuous increase of the coercivity of the storage media. In order to be able to record on these everhigher-coercivity media, new soft magnetic materials for pole tips with increased magnetic moment had to be developed. Significant progress has been made during the last few years in electroplating a...

in this research controlled coating of magnetite (fe3o4) nanoparticles with sio2 was investigated. the fe3o4 nanoparticles were synthesized via chemical co-precipitation and then coated by silica according to stober method. effects of tetra ethyl ortho silicate (teos) concentration and ethanol to teos on the coating thickness were investigated. x-ray powder diffraction, fourier transform infrar...

This study observes that copper (Cu) films deposited by high current densities or in an aged electrolyte easily generate void defects after chemical mechanical polishing (CMP). The (111)/(200) ratio and the impurity amount of an electroplated Cu film are found to have strong correlation with the formation of void defects. Furthermore, pulse-reverse waveform plating following direct current plat...

Poisoning from exposure to fresh cadmium fumes at work has long been described but cases may remain undiagnosed. The diagnosis of acute cadmium poisoning should be considered in any workman who has been occupied in high temperature welding in confined spaces. Surfaces electroplated with cadmium may go unrecognised and present a significant hazard. Freshly formed cadmium oxide fumes may cause pu...