Ion beam milling has become a widespread specimen preparation technique for non-biological materials over the last two decades, particularly for cross-sectional and plan-view transmission electron microscope (TEM) specimens. The basic principle of ion milling involves bombarding a specimen with energetic ions or neutral atoms acclerated and formed into a tightly focused ion beam. Material is sp...

The influence of dose rate, i.e., ion flux, on ion beam mixing in Nb-Si bilayer samples was measured at room temperature and 325 °C. At the higher temperature, an increase in dose rate of a factor of 20 caused a decrease in the thickness of the mixed layer by a factor of 1.6 for equal total doses. At room temperature, the same change in flux had no effect on mixing. These results are consistent...

The measurement of features from the microand precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro-CMM probe. The pr...

A new method of investigating structures below a surface in a dual beam microscope is presented. It comprises electrical measurements in depth profiles of sequential focused ion beam (FIB) cuts by the use of two or more nanomanipulators with plugged in probe needles. The sample is oriented such that the structures are observed with the electron beam while they are cut free with the FIB. The nan...

A. Errachid, E. Martínez, C. Mills, G. Villanueva, J. Bausells, J. Samitier Laboratory of Nanobioengineering (CREBEC), Barcelona Science Park, Josep Samitier 1-5, 08028 Barcelona, Spain. E-mail: [email protected], http://www.pcb.ub.esT Nanotechnology Platform, Barcelona Science Park, Josep Samitier 1-5, 08028 Barcelona, Spain Centro Nacional de Microelectrónica (IMB-CSIC), Campus UAB, 08193 B...

The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...