Ultrasound wave is a kind of waves with the frequency higher than the human audible frequency. Although ultrasound was first used for military identification purposes, it has been used for decades for various other applications, especially medical applications. Medical applications of ultrasound include diagnostic and therapeutic applications, such as for the treatment of cancer. In this paper,...

In the last few years several types of MEMS-based spectrometer systems emerged, mainly addressing the NIR spectral range. The presented MEMS-based sensor prototype operates in the mid-IR range between 2200 cm and 2500 cm. The main element is a blazed micro-electro-mechanical reflective grating device with an aperture of 3x3 mm2. The optical setup of the sensor corresponds to a Czerny-Turner typ...

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy a...

The paper introduces predictive modeling of generic memcapacitors using multi-port versions fundamental elements Chua’s table. Generic are the most common type memcapacitive systems; they behave as state-dependent capacitors, with capacitance being independent voltage and charge. model consists a multiport capacitor an associated dynamic system that represents state dynamics. It is shown potent...

fabrication, characterization and application of micro-/nano-rods/wires are among the hottest topics in materials science and applied physics. micro-/nano-rod-based structures and devices are developed for a wide-ranging use in various fields of micro-/nanoscience (e.g. biology, electronics, medicine, optics, optoelectronics, photonics and sensors). it is well known that the structure and prope...

In this paper we develop a numerical procedure using finite element and augmented Lagrangian meth-ods that simulates electro-mechanical pull-in states of both cantilever and fixed beams in microelectromechanical systems (MEMS) switches. We devise the augmented Lagrangian methods for the well-known Euler-Bernoulli beam equation which also takes into consideration of the fringing effect of electr...

In this investigation, micro voltage, temperature and humidity sensors were fabricated and integrated for the first time on a stainless steel foil using micro-electro-mechanical systems (MEMS). These flexible multi-functional micro sensors have the advantages of high temperature resistance, flexibility, smallness, high sensitivity and precision of location. They were embedded in a proton exchan...

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably an...

A case-based reasoning (CBR) knowledge base has been incorporated into a Micro-Electro-Mechanical Systems (MEMS) design tool that uses a multi-objective genetic algorithm (MOGA) to synthesize and optimize conceptual designs. CBR utilizes previously successful MEMS designs and sub-assemblies as building blocks stored in an indexed case library, which serves as the knowledge base for the synthesi...

Although negligible at macroscopic scales, capillary forces become dominant as the sub-millimetric scales of micro-electro-mechanical systems (MEMS) are considered. We review various situations, not limited to micro-technologies, where capillary forces are able to deform elastic structures. In particular, we define the different length scales that are relevant for 'elasto-capillary' problems. W...