Due to its desirable material properties, Silicon Carbide (SiC) has become an alternative material to replace Si for Microelectromechanical Systems (MEMS) applications in harsh environments. To promote SiC MEMS development towards future cost-effective products, main technology areas in material deposition and processes have attracted significant interest. The developments in these areas have c...

This paper presents the design of a V-band switched-line phase shifter using SP4T RF-MEMS switches. Sonnet simulations are used to achieve accurate circuit models of both the RF-MEMS switches as well as CPW bends within the phase shifter. The V-band phase shifter utilizes two SP4T RF-MEMS switches to perform the delay line switching. The RF performance of the SP4T MEMS switch is optimized to ad...

MEMS is the acronym for Micro Electro Mechanical Systems. Micromachining has potential applications for large area image sensors and displays, but conventional MEMS technology, based on crystalline silicon wafers cannot be used. Instead, large area devices use deposited films on glass substrates. This presents many challenges for MEMS, both as regards materials for micro-machined structures and...

MEMS-based storage is one of the leading candidates as tomorrow’s storage medium due to its salient characteristics such as high-parallelism, high density, and low-power consumption. Because physical structures of MEMS-based storage is different from those of hard disks, new software management techniques for MEMS-based storage are needed. Specifically, MEMS-based storage has thousands of paral...

time-dependent schrödinger equation for a 1-d model of hydrogen molecular ion h2+ in intenselaser field linearly polarized along the molecular axis is solved. ionization rates are calculated for differentinitial states. the evolution of electronic wavefunction at fixed inter-nuclear separations are simulated andanalyzed. the results obtained for the ground state of this 1-d model of h2+ show ap...

The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional communication components because they consume less DC power, have lower losses, higher linearity and higher Q factor. However, the commercialization of RF MEMS devices is hindered by technological issues such as their...

MEMS-based storage devices are a new technology that is significantly different from both disk drives and semiconductor memories. These differences motivate the question of whether they need new abstractions to be utilized by systems, or if existing abstractions will work well. This paper addresses this question by examining the fundamental reasons that the abstraction works for existing system...

Although Micro-Electro-Mechanical Systems (MEMS) are forming the basis for a rapidly growing industry and fields of research, many MEMS designers still rely on backof-the-envelope calculations due to a lack of efficient computer-aided design (CAD) tools that can assist with the initial stages of design exploration. This paper introduces case-based reasoning (CBR) techniques to the design of MEM...

Strain sensors based on individual ZnO piezoelectric fine-wires (PFWs; nanowires, microwires) have been fabricated by a simple, reliable, and cost-effective technique. The electromechanical sensor device consists of a single electrically connected PFW that is placed on the outer surface of a flexible polystyrene (PS) substrate and bonded at its two ends. The entire device is fully packaged by a...