This paper reports a self-aligned three-dimensional process (3D-SOULE) that incorporates batch-mode micro ultrasonic machining (μUSM), lapping and micro electro-discharge machining (μEDM) for fabrication of concave and mushroom-shaped spherical structures from hard and brittle materials. To demonstrate the process, 1 mm structures are fabricated from glass and ruby spheres. The μEDM technique i...

This paper presents a new research study on the platform fabrication of fluorescence bio-detection chip with an optical fiber transmission. Anisotropic wet etching on (100) silicon wafers to fabrication V-groove for optical fiber alignment and micro-mirror were included. Combing with anodic bonding technique to adhere glass, silicon structure and optical fiber for a fluorescence excitation plat...

The paper investigates the fabrication of Selective Laser Melting (SLM) titanium alloy Ti6Al4V micro-lattice structures for the production of lightweight components. Specifically, the pillar textile unit cell is used as base lattice structure and alternative lattice topologies including reinforcing vertical bars are also considered. Detailed characterizations of dimensional accuracy, surface ro...

Ultra-hydrophobic bilayer coatings on a glass surface were fabricated by sol-gel process using hexadecyltrimethoxysilane (C16TMS) and tetramethoxysilane (TMOS) (1:4 molar ratio) as precursors. After coating, silica nanoparticles (SiO₂ NPs) functionalized with different mono-alkoxy derivatives (methoxytrimethylsilane, TMeMS; ethoxydimethylvinylsilane, DMeVES; ethoxydimethylphenylsilane, DMePhES;...

Based on the characteristics of solid magnetic abrasive and abrasive flow finishing, a new technology of viscoelastic magnetic abrasive finishing is presented. The theoretical micro model of viscoelastic magnetic abrasive tools is established, and influencing factors of a positive pressure are determined by force analysis. Finishing mechanism of micro-grinding, slipping, rolling and so on is an...

A new analytical model is developed for predicting thermal contact resistance (TCR) of non-conforming rough contacts of bare solids in a vacuum. Instead of using probability relationships to model the size and number of microcontacts of Gaussian surfaces, a novel approach by employing the “scale analysis methods” is taken. It is shown that the mean size of the microcontacts is proportional to t...

The first precise measurement of the Casimir force between dissimilar metals is reported. The attractive force, between a Cu layer evaporated on a microelectromechanical torsional oscillator and an Au layer deposited on an Al2O3 sphere, was measured dynamically with a noise level of 6 fN/sqrt[Hz]. Measurements were performed for separations in the 0.2-2 micro m range. The results agree to bette...

A fast combinatorial approach to access information about the immobilization behavior and kinetics of enzymes on a variation of surfaces is presented. As a test system, Candida Antarctica Lipase B was immobilized on a self-assembled monolayer bearing a gradient of surface energy. The respective immobilization behavior was monitored by Fourier transform infrared micro-spectroscopy. In addition, ...

Wire EDM is one of the latest advanced micro-machining techniques, where a thin wire (Ǿ= 0.25 mm) of tool electrode is fed on the work piece which gradually shears off the material during the machining process. This micro-machining process may help overcome the limitations and restriction faced during conventional mechanical machining process. This paper is based on wire-EDM machining of a part...

While ceramics are important materials for electronic and microsystem packaging, they are difficult to pattern lithographically. LEEDUS, a fabrication process combining lithography, electroplating, batch mode micro electro-discharge machining (µEDM) and batch mode micro ultrasonic machining (µUSM), is presented in this paper. This technology provides die-scale pattern transfer capability from l...