نتایج جستجو برای: hfcvd
تعداد نتایج: 63 فیلتر نتایج به سال:
Abstract A multistep deposition technique is developed to produce highly oriented diamond films by hot filament chemical vapor (HFCVD) on Si (111) substrates. The orientation produced use of a thin, 5–20 nm, Ni interlayer. Annealing studies demonstrate diffusion into form nickel silicides with crystal structure depending temperature. HFCVD film interlayer results in reduced non-diamond carbon, ...
Direct synthesis of large-scale ternary boron carbonitride single-walled nanotubes (BCN-SWNTs) via a bias-assisted HFCVD process was presented. The BCN-SWNTs were grown over the powdery Fe-Mo/MgO catalyst by using CH4, B2H6, and ethylenediamine vapor as the reactant gases. As high as 16 atom % nitrogen can be incorporated within the nanotube shells, with the boron content in the range of 2-4 at...
Diamond like carbon (DLC) film was grown by hot filament chemical vapor deposition (HFCVD)technique. In the present work, we investigated the quality of the DLC films groew on the substratesthat were coated with various metal nanocatalysts (Au and Ni). A combination of CH4/Ar/H2 rendersthe growth of carbon nanostructures technique (diamond like carbon). The utilized samples werecharacterized by...
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