This paper presents a nonlinear model of a clamped-clamped microbeam actuated by an electrostatic load with stretching and thermoelastic effects. The frequency of free vibration is calculated by discretization based on the Differential Quadrature (DQ) Method. The frequency is a complex value due to the thermoelastic effect that dissipates energy. By separating the real and imaginary parts of fr...

 Using the SEM analysis technique, we present the first direct evidences of the non-uniform distribution of charges trapped in the dielectric layer during the actuation of electrostatic MEM devices. We highlight the importance of the contact quality to control the charge injection in the dielectric. We further incorporate the non-uniform charge distribution in a 2D model of the actuation of de...

We demonstrate a large aspect ratio self-aligned silicon nanopillar electromechanical switch achieved with a single lithography step. This compact vertical device can be aggressively scaled by virtue of self-limiting oxidation. We describe a scaling relation that outlines the design space for this class of low voltage nanorelays. Summary of Research: We summarize: (a) the implications of electr...

In this paper a novel RF MEMS cantilever type switch with low actuation voltage is presented. The cantilever beam of switch is supported by two L-shaped springs to reduce the spring constant. The switch is simulated using Intellisuite software. The actuation voltage of switch is achieved about 2 volt and the size of the switch is 110×60μm, that in compared with other electrostatic cantilever be...

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by ...

The aim of this paper is to propose a complete normalized study of a diaphragm's behavior under classical excitation encountered in microsystem: pneumatic, electrostatic, piezoelectric and magnetic. The principle of modeling is widely described in order to be easily applied to other structure. First, a traditional analytical solution is recalled for the diaphragm's deflection based on energy mi...

The electromechanical properties of arrays of vertically aligned multiwalled carbon nanotubes were studied in a parallel plate capacitor geometry. The electrostatic actuation was visualized using both optical microscopy and scanning electron microscopy, and highly reproducible behaviour was achieved for actuation voltages below the pull-in voltage. The walls of vertically aligned carbon nanotub...

this paper presents a nonlinear model of a clamped-clamped microbeam actuated by an electrostatic load with stretching and thermoelastic effects. the frequency of free vibration is calculated by discretization based on the differential quadrature (dq) method. by separating the real and imaginary parts of frequency, the quality factor of thermoelastic damping is calculated. both the stretching a...

In this research, a functionally graded microbeam bonded with piezoelectric layers is analyzed under electric force. Static and dynamic instability due to the electric actuation is studied because of its importance in micro electro mechanical systems, especially in micro switches. In order to prevent pull-in instability, two piezoelectric layers are used as sensor and actuator. A current amplif...