This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explaine...

Wafer bonding has been widely used for forming vacuum and hermetic packages for MEMS devices. Several techniques, including anodic silicon-glass, silicon-silicon fusion, metal compression, glass frit, eutectic, and solder bonding have been attempted and some have been demonstrated successfully. Solders have some advantages that make them an interesting area of research for wafer bonding. They o...

This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. M...

In this paper, an Adaptive Neuro Fuzzy Inference System (ANFIS) based control is proposed for the tracking of a Micro-Electro Mechanical Systems (MEMS) gyroscope sensor. The ANFIS is used to train parameters of the controller for tracking a desired trajectory. Numerical simulations for a MEMS gyroscope are looked into to check the effectiveness of the ANFIS control scheme. It proves that the sy...

A new type of MEMS sensor has been developed for measuring AC electric current. The sensor is comprised of a piezoelectric aluminum nitride MEMS cantilever with a microscale composite permanent magnet mounted to its free end. When placed in proximity to a wire carrying AC current, the alternating magnetic field surrounding the wire induces a sinusoidal force on the sensor magnet, deflecting the...

Wireless MEMS sensors network has been widely used in many fields. In this paper the MEMS pressure sensor is integrated on a sensor board with Zigbee sensor network for real-time local bridge scour depth monitoring during a flood. The wireless MEMS pressure sensor scour monitoring system has been developed and tested in the laboratory. Local scour is one of the major factors for bridge failure....

In this paper, presented are a design and test results of MEMS angular rate sensor of wide input range and wide bandwidth. Open loop performances of conventional MEMS rate sensor are very limited because of its nonlinear input-output relationship and very small bandwidth. In this study, a phase lead control scheme is applied to enlarge the operating range of the sensor. The structure of angular...

In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam dampin...