The graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS) circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the l...

The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS) technology. The structure of the micromachined switch is composed of a membrane, eight springs, four inductors, and coplanar waveguide (CPW) lines. In order to reduce the actuation voltage of the s...

This paper presents an innovative design of a low loss RF MEMS switch, with low actuation voltage (VT) & improved mechanical stability. The switch is less sensitive to the stiction and has less damping effect which ultimately increases the reliability of the switch. The specialty of this switch is that its beam is made up of two materials, one gives mechanical stability and other provides the c...

This paper presents the design, fabrication and characterization of an RF MEMS switch. Low actuation voltage and high isolation of the switch were achieved by exploiting buckling and bending effects induced by well-controlled residual stress. The effects of residual stress on improving the switch performance have been investigated using both analytical and numerical methods. The proposed RF swi...

ABSTRACT The dynamics of the acoustic streaming and the acoustic positioning performance in an ultrasound-actuated multiwell microplate are investigated by two different ultrasonic frequency actuation schemes: Frequency-modulation and single-frequency actuation. Our results show a significant decrease in size of the field of view when using frequencymodulation compared to single-frequency actua...

This paper investigates the parametric excitation of a micro-pipe conveying fluid suspended between two symmetric electrodes. Electrostatically actuated micro-pipes may become unstable when the exciting voltage is greater than the pull-in value. It is demonstrated that the parametric excitation of a micro-pipe by periodic (ac) voltages may have a stabilizing effect and permit an increase of the...

Acoustic actuation of bioinspired microswimmers is experimentally demonstrated. Microswimmers are fabricated in situ in a microchannel. Upon acoustic excitation, the flagellum of the microswimmer oscillates, which in turn generates linear or rotary movement depending on the swimmer design. The speed of these bioinspired microswimmers is tuned by adjusting the voltage amplitude applied to the ac...

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by ...

It is shown theoretically and experimentally that opto-electrowetting may be used for both pulling and pushing liquid droplets. A theoretical nalysis based on the Lippmann-equation and an electronic equivalent circuit model allows definition of a voltage and frequency range for which ushing may be achieved, a novelty in electrowetting-based actuation. Experimental confirmation of the effect dem...

The present research attempts to explain dynamic pull-in instability of functionally graded micro-cantilevers actuated by step DC voltage while the fringing-field effect is taken into account in the vibrational equation of motion. By employing modern asymptotic approach namely Homotopy Perturbation Method with an auxiliary term, high-order frequency-amplitude relation is obtained, then the infl...