نتایج جستجو برای: electro mechanical systems mems
تعداد نتایج: 1410598 فیلتر نتایج به سال:
The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to...
Getting Micro-Electro-Mechanical Systems (MEMS) out of a wafer after fabrication processes is of great interest in testing, packaging or simply using these devices. Actual solutions require special machines like wafer dicing machines, increasing time and cost of de-tethering MEMS. This article deals with a new solution for manufacturing mechanical de-tetherable silicon MEMS. The presented solut...
Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to t...
Optical MEMS have the potential to drastically reduce the size and cost of digital communications and computation systems. However, the multiple technologies (optical, electrical, and mechanical) utilized in optical MEM systems has led to new challenges in the creation of computer aided design tools for these systems. This paper presents a system level opto-electro-mechanical CAD tool, Chatoyan...
Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale, and function individually or in arrays to generate effects on the ma...
Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...
In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...
We review concurrent multiscale simulations of dynamic and temperature-dependent processes found in nanomechanical systems coupled to larger scale surroundings. We focus on the behavior of sub-micron MicroElectro-Mechanical Systems (MEMS), especially microresonators. These systems are often called NEMS, for Nano-Electro-Mechanical Systems. The coupling of length scales methodology we have devel...
In this paper, a fluidic biosensor with possibility to fabricate by Micro-Electro-Mechanical Systems (MEMS) technology is proposed for biomedical mass detection and lab-on-chip applications. This is designed by electromechanical coupling of harmonic micromechanical resonators with harmonic springers as a mechanical resonator array. It can disperse mechanical wave along the array by electrostati...
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