RF MEMS switches can be used to achieve reconfigurability of various RF systems and in particularly for miniaturized antenna structures. In case of micro machined antennas, which involve low voltage signals, RF MEMS switches with low actuation voltage are required for achieving reconfigurability. The capacitive shunt switch derives its switching property from the significant difference of its c...

This paper presents a novel RF MEMS (Micro Electromechanical System) fixed-fixed switch for very fast switching. Using the obtained equations, the switching time depends on the stiffness and effective mass of the switch beam so that the switching time will be decreased by higher stiffness (spring constant) and lower effective mass. In new design, the suspension bridge is a three-layer beam so t...

Two methods of attaching fluidic interconnects are presented. By using gold to gold fusion bonding and copper to gold fusion bonding, micro-scale tubes are attached to a MUMPS fabricated fluidic channel. The fusion bonding is done by resistively heating a gold layer on top of the poly 2 layer, so that the gold melts. A range of different heater geometries is presented. The tensile and shear str...

This paper reports on the design, fabrication, and testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications. The mechanical design of low spring-constant folded-suspension beams is presented first, and switches using these beams are demonstrated with measured actuation voltages of as low as 6 V. Furthermore, common nonidealities such as res...

Inductive micro-switch is an integrative device of a sensor and actuator and widely applied in all-opticalnetwork communication. Its malfunctions related to “fail-to-closure” and “transient-closure” result in low reliability and weak anti-jamming capability. A new bistable inductive micro-switch is presented based on micro electro-mechanical system (MEMS) technology. A sine rough surface model ...

This paper describes the integration of opto-chemosensors in microfluidics networks. Our technique exploits the internal surface of the network as a platform to build a sensing system by coating the surface with a self-assembled monolayer and subsequently binding a fluorescent sensing molecule to the monolayer. Fluorescent molecules were used that can switch between a fluorescent and a non-fluo...

   This paper deals with the development and modeling of cylindrical contact theories and also the simulation of contact forces to be applied in the manipulation of various biological micro/nanoparticles by means of the AFM. First, the simulation of contact forces in four environments has been carried out, which are the most commonly used fluid in biomanipulation. Then, the spherical and cy...